MEMS Interferometric Accelerometer

Overview

We demonstrate a promising type of microfabricated accelerometer based on optical interferometry. The interferometer consists of surface-micromachined interdigital fingers that are alternately attached to a proof mass and support substrate. This novel approach achieved superior sensitivity and accuracy compared to conventional capacitive sensing methods.

Technical Details

Design Implementation

Performance Metrics

Construction

Media

MEMS Accelerometer
Device Structure
Microscope image of the interdigital finger structure

Technical Innovation

Applications

Contributors

Emily Cooper, Rehmi Post, Saul Griffith, Jeremy Levitan, and Scott Manalis

CC BY-SA 4.0 Rehmi Post. Last modified: February 12, 2025. Website built with Franklin.jl and the Julia programming language.